| 真空热处理对NiCrA1Y薄膜表面高温氧化的影响 |
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| 引用本文： | 李瑶,陈寅之,唐永旭,蒋洪川,刘兴钊.真空热处理对NiCrA1Y薄膜表面高温氧化的影响[J].电子元件与材料,2011(11):9-11. |
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| 作者姓名： | 李瑶 陈寅之 唐永旭 蒋洪川 刘兴钊 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室; |
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| 摘 要： | 采用直流磁控溅射法在镍基高温合金DZ4上制备了NiCrA1Y薄膜,并对NiCrA1Y薄膜进行真空热处理后再进行高温氧化,以生成一层致密的Al2O3膜,研究了真空热处理对NiCrAlY薄膜表面高温氧化的影响.结果表明:经过真空热处理的NiCrA1Y薄膜,高温氧化后表面生成了单一、稳定的α-Al2O3相,Al和O的粒子数分...
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| 关 键 词： | NiCrA1Y薄膜 真空热处理 高温氧化 |
Effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films |
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| LI Yao,CHEN Yinzhi,TANG Yongxu,JIANG Hongchuan,LIU Xingzhao.Effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films[J].Electronic Components & Materials,2011(11):9-11. |
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| Authors: | LI Yao CHEN Yinzhi TANG Yongxu JIANG Hongchuan LIU Xingzhao |
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| Affiliation: | LI Yao,CHEN Yinzhi,TANG Yongxu,JIANG Hongchuan,LIU Xingzhao(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China) |
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| Abstract: | NiCrAlY films were deposited on the nickel-based superalloy DZ4 by DC magnetron sputtering.The NiCrAlY films were annealed in vacuum and then oxidized at high temperature to form a layer of dense Al2O3 on the surface of the film.The effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films were studied.The results show that a single stable α-Al2O3 phase is formed on the surface of the NiCrAlY film which is oxidized at high temperature in oxygen atmosphere after vacuum heat treatment,and the population fractions of Al and O on the surface of this film are about 32% and 50%,respectively.θ-Al2O3 and α-Al2O3 phases are formed on the surface of the NiCrAlY film without vacuum heat treatment after high temperature oxidation,and with uneven distribution. |
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| Keywords: | NiCrAlY film vacuum heat treatment high temperature oxidation |
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