| 磁控溅射法制备Ag/FePt/C/FePt薄膜的结构和磁性能 |
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| 引用本文： | 王永红,刘梅,张玉梅,陈芳慧,李海波.磁控溅射法制备Ag/FePt/C/FePt薄膜的结构和磁性能[J].电子元件与材料,2010,29(8). |
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| 作者姓名： | 王永红 刘梅 张玉梅 陈芳慧 李海波 |
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| 作者单位： | 吉林师范大学,凝聚态物理与材料科学研究所,吉林,四平,136000 |
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| 基金项目： | 国家自然科学基金资助项目，教育部科技研究重点项目 |
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| 摘 要： | 采用磁控溅射法,在自然氧化的Si(001)基片上沉积了Ag/FePt/C/FePt纳米薄膜,并分别在400,450,500,600℃下对薄膜样品进行了1h的退火热处理。利用X射线衍射仪和振动样品磁强计,对薄膜样品的结构和磁性进行了分析。结果表明,当热处理温度为450℃时,Ag/FePt/C/FePt薄膜中已形成了具有有序面心四方结构的L10-FePt。随着热处理温度的升高,薄膜样品的有序化程度提高,矫顽力Hc增强,晶粒尺寸变大。当热处理温度为600℃时,薄膜样品的平行膜面Hc为905.8kA·m-1,晶粒尺寸为23nm。
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| 关 键 词： | 磁控溅射法 FePt 结构 磁性能 |
Structure and magnetic properties of Ag/FePt/C/FePt thin films prepared by magnetron sputtering |
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| WANG Yonghong,LIU Mei,ZHANG Yumei,CHEN Fanghui,LI Haibo.Structure and magnetic properties of Ag/FePt/C/FePt thin films prepared by magnetron sputtering[J].Electronic Components & Materials,2010,29(8). |
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| Authors: | WANG Yonghong LIU Mei ZHANG Yumei CHEN Fanghui LI Haibo |
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| Affiliation: | WANG Yonghong,LIU Mei,ZHANG Yumei,CHEN Fanghui,LI Haibo(Institute of Condensed Matter Physics and Materials Science,Jilin Normal University,Siping 136000,Jilin Province,China) |
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| Abstract: | Ag/FePt/C/FePt thin films were deposited on the self-oxidized Si(001) substrate by the magnetron sputtering method,and then they were annealed in vacuum for 1 h at 400,450,500 and 600 ℃,respectively.The structure and magnetic properties of the prepared thin films were investigated with the X-ray diffraction(XRD) and vibrating sample magnetometer(VSM).The results show that,when the annealing temperature is 450 ℃,L10-FePt with ordered face centered tetragonal structure appears in the Ag/FePt/C/FePt thin film.With increasing annealing temperature,the degree of ordering,the value of Hc and the grain size of the Ag/FePt/C/FePt thin films increase.When the annealing temperature is 600 ℃,the coercivity of the Ag/FePt/C/FePt thin film in plane reaches 905.8 kA·m-1,while its grain size is about 23 nm. |
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| Keywords: | FePt |
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