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阳极氧化铝模板法制备纳米电子材料
引用本文:王刚,阎康平,周川,严季新.阳极氧化铝模板法制备纳米电子材料[J].电子元件与材料,2002,21(5):27-30.
作者姓名:王刚  阎康平  周川  严季新
作者单位:1. 四川大学,四川,成都,610065
2. 江苏中联科技集团,江苏,通州,226361
摘    要:阳极氧化铝模板具有容易制备、成本低、孔道分布均匀等特点,是制备形状高度均匀、有序纳米电子材料的理想无机模板。该模板法制得的金属、半导体和非金属纳米材料具有不同于母材的光、电、磁等特殊性能,在新型电子材料的开发方面具有广阔的应用前景。文中介绍了该模板的阳极氧化工艺、成膜机理以及不同的电解液、氧化电流、电压等因素对模板的纳米孔道生长的影响。分析了纳米材料的直流电沉积和交流电沉积的电化学机理和沉积速率的影响因素。

关 键 词:纳米材料  阳极氧化铝  模板法
文章编号:1001-2028(2002)05-0027-04

Anodized Aluminum Oxide Template for Processing Nanomaterials
WANG Gang YAN Kang-ping,ZHOU Chuan,YAN Ji-xin.Anodized Aluminum Oxide Template for Processing Nanomaterials[J].Electronic Components & Materials,2002,21(5):27-30.
Authors:WANG Gang YAN Kang-ping  ZHOU Chuan  YAN Ji-xin
Affiliation:WANG Gang1 YAN Kang-ping1,ZHOU Chuan1,YAN Ji-xin2
Abstract:The features of the anodic aluminum oxide (AAO) template, such as low cost, easy preparation and uniform tunnel arrays make it an ideal inorganic substrate for highly ordered electronic nanomaterials. The process of anodizing, mechanism of alumna forming and the factors of electrolyte, anodic current and potential for preparing this template are introduced. The mechanisms for both ac electrodeposition and dc electrodeposition are analyzed. The thickness of barrier, diameter of pores and electroplating potential. By means of AAO template, many kinds of nanomaterials are obtained,including metals, semiconductors, and carbon tubes. They have exhibited some special nature in optics, electronics andmagnetics. Incipient application of these materials in industry to promote the development of novel electronic materials is promising.
Keywords:nanomaterials  anodized aluminum oxide  template process
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