| BST薄膜的微结构研究 |
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| 引用本文： | 陈宏伟,杨传仁,符春林,赵莉,高志强.BST薄膜的微结构研究[J].电子元件与材料,2005,24(2):29-31. |
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| 作者姓名： | 陈宏伟 杨传仁 符春林 赵莉 高志强 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 采用射频磁控溅射法在 Pt/Ti/SiO2/Si 衬底上制备了钛酸锶钡(BST)薄膜。利用 X 射线光电子能谱(XPS)、X射线衍射(XRD)分别研究了 BST 薄膜的成分、晶体结构。用优化的成膜工艺制备出成分与靶材基本一致,具有钙钛矿结构的 BST 多晶薄膜。利用扫描力显微镜中的压电模式(PFM)观察到了 BST 薄膜中的 a 畴和 c 畴,初步确定在 BST薄膜中多畴转变为单畴的临界尺寸为 28~33 nm。
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| 关 键 词： | 无机非金属材料 钛酸锶钡薄膜 射频磁控溅射 微结构 电畴 |
| 文章编号： | 1001-2028(2005)02-0029-03 |
Study on the Microstructure of BaxSr1-xTiO3 Thin Films |
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| CHEN Hong-wei,YANG Chuan-ren,FU Chun-lin,ZHAO Li,GAO Zhi-qiang.Study on the Microstructure of BaxSr1-xTiO3 Thin Films[J].Electronic Components & Materials,2005,24(2):29-31. |
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| Authors: | CHEN Hong-wei YANG Chuan-ren FU Chun-lin ZHAO Li GAO Zhi-qiang |
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| Abstract: | BST thin films were deposited on Pt/Ti/SiO2/Si substrates by RF magnetron sputtering. The composition and crystalline structure of BST thin films were characterized by X-ray photoelectron spectrum (XPS) and X-ray diffraction (XRD). The composition of BST thin film with perovskite polycrystalline structure is close to that of the BST ceramics target by adjusting deposition conditions. Nanometer-sized a-domain and c-domain were observed by piezoresponse force microscopy (PFM). It is found that the critical size from a multi-domain to a single-domain is between 28~33 nm. |
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| Keywords: | inorganic non-metallic materials BST thin film RF magnetron sputtering microstructure domain |
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