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sol-gel法制备WO_3电致变色薄膜的工艺研究
引用本文:姚妍,马立群,丁毅,王琳瑛,杨猛.sol-gel法制备WO_3电致变色薄膜的工艺研究[J].电子元件与材料,2009,28(6).
作者姓名:姚妍  马立群  丁毅  王琳瑛  杨猛
作者单位:南京工业大学,材料科学与工程学院,江苏,南京,210009
摘    要:采用sol-gel法制备了WO3电致变色薄膜,通过工艺参数的优化,对WO3薄膜的电致变色性能、表面结构和物相进行比较研究。结果表明:陈化3d的前驱体溶液,以5cm/min的提拉速度在ITO导电玻璃基体上镀膜,经250℃保温60min热处理的薄膜在着色态、褪色态下的透射率之差达到50%以上,电致变色可逆性能较好。

关 键 词:sol-gel法  WO3薄膜  电致变色  工艺参数

Study on process of WO_3 elecrochromic thin film deposited by sol-gel method
YAO Yan,MA Liqun,DING Yi,WANG Linying,YANG Meng.Study on process of WO_3 elecrochromic thin film deposited by sol-gel method[J].Electronic Components & Materials,2009,28(6).
Authors:YAO Yan  MA Liqun  DING Yi  WANG Linying  YANG Meng
Affiliation:College of Materials Science and Engineering;Nanjing University of Technology;Nanjing 210009;China
Abstract:The WO3 electrochromic thin film was prepared by sol-gel method and the best process parameters was optimized.The transmittance characteristic,the phase structure and the surface morphology were investigated.The results indicate that the WO3 thin films has better electrochromic performance with the precursor aging time of 3 d,pulling velocity of 5 cm/min,heat treatment temperature of 250 ℃ and the holding time of 60 min.The transmittance D-value of colored and bleached state is above 50% and this film sample has better reversibility.
Keywords:sol-gel method  WO3 thin film  electrochromic  process parameters  
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