| 共面微波探针在片测试技术研究 |
| |
| 引用本文： | 孙伟,田小建,何炜瑜,张大明,李德辉,衣茂斌.共面微波探针在片测试技术研究[J].电子学报,2001,29(2):222-224. |
| |
| 作者姓名： | 孙伟 田小建 何炜瑜 张大明 李德辉 衣茂斌 |
| |
| 作者单位： | 集成光电子学国家重点联合实验室吉林大学实验区,吉林大学,长春 130023 |
| |
| 基金项目： | 博士点基金，集成光电子学国家联合重点实验室开放课题项目 |
| |
| 摘 要： | 本文描述了使用共面微波探针的半导体芯片在片测试技术.设计研制出的多种微波探针性能参数稳定,使用寿命在十万次以上,用于在片检测各种GaAs共面集成电路芯片.触头排列为GSG的微波探针,-3dB带宽及反射损耗分别为14GHz和小于-10dB.
|
| 关 键 词： | 微波探针 在片测试 半导体集成电路 |
| 文章编号： | 0372-2112(2001)02-0222-03 |
| 收稿时间： | 1999-11-23 |
On-Wafer Measurement Techniques Using Coplanar Microwave Probe |
| |
| SUN Wei,TIAN Xiao-jian,HE Wei-yu,ZHANG Da-ming,LI De-hui,YI Mao-bin.On-Wafer Measurement Techniques Using Coplanar Microwave Probe[J].Acta Electronica Sinica,2001,29(2):222-224. |
| |
| Authors: | SUN Wei TIAN Xiao-jian HE Wei-yu ZHANG Da-ming LI De-hui YI Mao-bin |
| |
| Affiliation: | National Integrated Optoelectronic Union Laboratory Jilin University Region,Jilin University,Changchun 130023,China |
| |
| Abstract: | We present an on-wafer measurement technique of semiconductor wafer using special coplanar microwave probes.The probe parameters are repeatable enough for S-parameter measurements and the probe life is with 100,000 contacts guaranteed.The multi-contact microwave wafer probe has been developed for on-wafer testing and sifting of GaAs integrated circuits with coplanar type.The insertion loss of microwave probe with a GSG footprint pattern is typically less than 30dB,and the return loss is at least 10dB at frequencies below 14GHz. |
| |
| Keywords: | microwave probe on-wafer test semiconductor integrated circuit |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《电子学报》浏览原始摘要信息 |
|
点击此处可从《电子学报》下载全文 |
