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水基料浆注凝法生产氧化铝陶瓷基片的关键技术
引用本文:陈大明,李斌太,杜林虎,仝建峰.水基料浆注凝法生产氧化铝陶瓷基片的关键技术[J].真空电子技术,2005(4):4-7.
作者姓名:陈大明  李斌太  杜林虎  仝建峰
作者单位:北京航空材料研究院,北京,100095
摘    要:介绍了水基料浆注凝法工业化生产氧化铝陶瓷基片的工艺流程,分析了该工艺与传统采用的有机料浆流延法的不同和优势,着重讲述了作者在具体操作中所解决的关键技术:基片材质组分设计优化、料浆配制技术、组合模具设计制造、氧化-还原引发凝胶化、坯片无(少)变形干燥、基片尺寸精密控制、叠层烧结工艺制度、整平热处理工艺、边角料回收处理再利用.

关 键 词:注凝法  氧化铝  基片
文章编号:1002-8935(2005)04-0004-04
修稿时间:2005年6月22日

The Key Technology of Alumina Substrate Produced by Aqueous Gel Casting
CHEN Da-ming,LI Bin-tai,DU Lin-hu,TONG Jian-Feng.The Key Technology of Alumina Substrate Produced by Aqueous Gel Casting[J].Vacuum Electronics,2005(4):4-7.
Authors:CHEN Da-ming  LI Bin-tai  DU Lin-hu  TONG Jian-Feng
Abstract:The flow chart of gel casting used for producing alumina ceramic substrate was introduced in this paper. The difference and superiority were contrasted between agueous gal casting and traditional organic tape casting. The key techniques we solved in practical operation were studied in detail, such as the optimal design of substrate composition, preparation of ceramic slurry, designing and producing combinatorial dies, geled procedure by oxidation and deoxidization action, desiccation of ceramic flan without (slight) distortion, precise control of size, sintered procedure by laminating, heat treatment of flattening, as well as callback and recycle of leftover materials.
Keywords:Gel casting  Alumina  Substrate  
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