AFM/STM系统中微悬臂的设计和研制

扫描隧道显微镜（ＳＴＭ）和原子力显微镜（ＡＦＭ）由于具有原子量级的分辨率，所以在表面物理、化学、生物等领域得到了越来越广泛的应用。我们研制了一个ＡＦＭ／ＳＴＭ系统，它利用隧道电流检测微悬臂的位移，既可用作ＡＦＭ，又可作为ＳＴＭ。本文介绍了这个系统的微悬臂的设计和研制。实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。

Design and Development of Cantilever in AFM/STM

STM and AFM have gotten wider and wider application in surface physics,chemistry,biology and so on ,because they have atomic level resolution.We have designed and developed an AFM/STM system,which used tunnel current to detect displace of cantilever,so the system can be used in STM as well as AFM.In this paper,we introduce design and development of cantilever in the system .It is demonstrated that the cantilever make the system have nanometer level resolution.