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纳米氧化层对坡莫合金薄膜性能的影响
引用本文:王东伟,丁雷,王乐,滕蛟,于广华.纳米氧化层对坡莫合金薄膜性能的影响[J].真空电子技术,2007(3):63-68.
作者姓名:王东伟  丁雷  王乐  滕蛟  于广华
作者单位:北京科技大学,材料科学与工程学院材料物理与化学系,北京,100083
基金项目:国家自然科学基金;教育部跨世纪优秀人才培养计划;国防科技应用基础研究基金
摘    要:采用磁控溅射的方法制备了Ta/NiFe/Ta磁电阻薄膜,分别将CoFe-NOL和Al2O3插层引入NiFe薄膜,研究纳米氧化层(NOL)对NiFe薄膜性能的影响。实验结果表明:将CoFe-NOL引入NiFe薄膜,CoFe-NOL对NiFe薄膜性能有重要影响,并且CoFe-NOL在薄膜中的位置不同影响效果也不同;CoFe-NOL处于Ta/NiFe界面时,由于破坏了NiFe薄膜的织构,导致了NiFe薄膜的各向异性磁电阻(AMR)值的减小和矫顽力的上升;CoFe-NOL处于NiFe/Ta界面时,则不会破坏NiFe薄膜的织构,其AMR值和矫顽力基本没有变化。将Al2O3插层引入NiFe薄膜,由于Al2O3插层的"镜面反射"作用,合适厚度的Al2O3插层可以改善薄膜的微结构,提高薄膜的磁电阻值,改善薄膜的磁性能。当Al2O3插层厚度为1.5 nm时,NiFe薄膜有最佳的微结构和性能。

关 键 词:Ni81Fe19薄膜  各向异性磁电阻  纳米氧化层  镜面反射
文章编号:1002-8935(2007)03-0063-06
修稿时间:2007-03-05

The Effects of Nano-Oxide Layers on the Performance of Permalloy Films
WANG Dong-wei,DING Lei,WANG Le,TENG Jiao,YU Guang-hua.The Effects of Nano-Oxide Layers on the Performance of Permalloy Films[J].Vacuum Electronics,2007(3):63-68.
Authors:WANG Dong-wei  DING Lei  WANG Le  TENG Jiao  YU Guang-hua
Affiliation:Department of Materials Physics and Chemistry, School of Materials Science and Engineering, University of Science and Technology Beijing , Beijing 100083, China
Abstract:Ta/NiFe/Ta films were prepared by means of magnetron sputtering.We investigated the effects of NOL on the performance of NiFe films by inserting CoFe-NOL and Al2O3 film into NiFe films respectively.The experimental results show that CoFe-NOL has a significant influence on magnetic properties of NiFe films.And this effect is sensitive to the position of CoFe-NOL in the films.When CoFe-NOL was inserted into the Ta/NiFe interface,it would destroy the texture of the NiFe film,and lead to the decrease of anisotropic magnetoresistance(AMR) and the enhancement of coercivity(Hc).However,when CoFe-NOL was inserted into the NiFe/Ta interface,AMR and Hc had little change due to without destroyed the texture of the NiFe film.Otherwise,by inserting Al2O3 film into NiFe films,Al2O3 film of right thickness could improve the texture,enhance AMR,and improve magnetic properties of NiFe films due to specular reflection of Al2O3 film.When the thickness of Al2O3 film was 1.5 nm,NiFe films obtained optimum texture and properties.
Keywords:Ni81Fe19 film  Anisotropic magnetoresistance  Nano-oxide layers  Specular reflection
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