氮化铝陶瓷的氧化机理研究

本文研究了不同氧化处理下氮化铝陶瓷的氧化情况,并使用Mo-Mn法进行金属化,测试封接强度及气密性,从而探究氮化铝瓷的氧化机制,氮化铝基瓷与氧化层之间的结合。结果表明:经过1100℃/1h高温氧化处理,氮化铝陶瓷表面几乎没有氧化。在1250℃/1h、1250℃/2h,表面生成了氧化铝,氧化层主晶相为AlN与Al2O3;在1350℃/1h下,氧化层主晶相为Al2O3;氧化层表面有明显的裂纹,均漏气。对不同处理后的氧化铝层表面进行Mo-Mn法金属化,当氧化层厚度较薄时,断裂发生在氧化层。氮化铝瓷与氧化铝层之间的结合机理可能是在两者之间产生了AlON等中间物,从而实现了氮化铝瓷与氧化层之间牢固的连接。

Study on Oxidation Mechanism of Aluminum Nitride Ceramics

The oxidation of aluminum nitride ceramics under different oxidation treatments was studied,and the metallization was carried out by Mo-Mn method to test the sealing strength and leakage,so as to explore the oxidation mechanisms of aluminum nitride ceramics and the bonding mechanism between aluminum nitride and oxide layers.The results show that the surface of the aluminum nitride ceramic is hardly oxidized after high temperature oxidation treatment at 1100°C for 1 h.After oxidation at 1250°C for 1 hour and 2 hseparately,alumina is formed on the surface of aluminum nitride,and the main crystalline phase of the oxide layer is AlN and Al2O3;while for 1 hour 1350°C oxidation,the main crystalline phase of the oxide layer is Al2O3.The surface of the oxide layer has obvious cracks,and both of them are leaking.The alumina surfaces with different treatment are subjected to Mo-Mn metallization.When the thickness of the oxide layer is thin,the fracture occurs in the oxide layer.The bonding mechanism between the aluminum nitride ceramic and the aluminum oxide layer may be that an intermediate for example AlON is generated between them,thereby achieving a firm connection between the aluminum nitride ceramic and the oxide layer.