| Abstract: | A phased array antenna was fabricated using four‐element ferroelectric phase shifters with a coplanar waveguide (CPW) transmission line structure based on a Ba0.6Sr0.4TiO3(BST)/MgO structure. Epitaxial BST films were deposited on MgO (001) substrates by pulsed laser deposition. To attain the large differential phase shift and small losses for a ferroelectric CPW phase shifter, an impedance‐matching‐part adding technique between the effective transmission line and connecting cable was used. The return loss and insertion loss for this technique‐adapted BST CPW device were improved with respect to those for a normal BST CPW device. For an X‐band phased array antenna system consisting of ferroelectric BST CPW phase shifters, power divider, dc block, patch antenna, and programmed dc power, the steering beam could be tilted by 15° in either direction. |
