电容式边缘传感器的设计

电容测微方法能够检测到微小的位移变化，在此利用电容测微法设计制作电容式边缘传感器，该传感器可以用来检测拼接在一起或者相互平行的两平板之间的位置变化。给出了电容式边缘传感器的设计原理，传感器的主要结构以及设计过程中遇到的问题和解决方案。并在实验室进行了验证，给出了实验结果。实验结果换算到位移变化达到了检测到小于5nm的位置变化的科研目标。该传感器可以广泛应用于拼接望远镜，法珀等天文仪器控制领域和其他工业控制领域。

Design of Capacitive Edge Sensor

The technique of capacitance micrometry can be used to detect very small displacement. A capacitive edge sen- sor is designed by the technique of capacitance micrometry. The gap and parallelism between two flats can be detected by ca- pacitive edge sensor. The principle and the structure of capacitive edge sensor device are introduced. Some important problems and answers are mentioned in this paper. The technique has been verified in the-~boratory and the results are presented. The performance is better than 5 nm. It allows the precise control in both fields of astronomical technique and industry.