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微波近场扫描显微镜无损介质层透视探测成像
引用本文:马慧瑾,白明,邵一鹏,苗俊刚.微波近场扫描显微镜无损介质层透视探测成像[J].现代电子技术,2012,35(10):68-72.
作者姓名:马慧瑾  白明  邵一鹏  苗俊刚
作者单位:北京航空航天大学,北京,100191
摘    要:在分析新型微波近场扫描显微镜同轴谐振腔工作模式的基础上,采用了S参量测量谐振腔多谐振频点S21幅值和相位的工作方式。为满足探测非透明物体内部隐藏结构的需求,利用谐振腔微扰理论和隐失场探测原理,实验测得介质层下金属隐藏结构的扫描微波图像,实现约0.01λ超分辨率的清晰图像。讨论了采用微波近场扫描显微镜方法进行的非透明物体内部无损探测技术,为进一步应用于物体内部无损探测和检验提供了重要的研究基础。

关 键 词:无损透视探测  微波近场扫描显微镜  隐失场  电容加载同轴谐振腔  探针

Non-destructive dielectric layer perspective detection imaging of scanning evanescent microwave microscope
MA Hui-jin , BAI Ming , SHAO Yip-eng , MIAO Jun-gang.Non-destructive dielectric layer perspective detection imaging of scanning evanescent microwave microscope[J].Modern Electronic Technique,2012,35(10):68-72.
Authors:MA Hui-jin  BAI Ming  SHAO Yip-eng  MIAO Jun-gang
Affiliation:(Beijing University of Aeronautics and Astronautics,Beijing 100191,China)
Abstract:Based on analyzing the coaxial resonator mode of new scanning evanescent microwave microscope(SEMM),a woking mode that the S21 amplitude and phase under multi-resonant frequencies is measured with S parameter is adopted.To meet the demand of detecting internal hidden structure of opaque objects,the cavity perturbation theory and evanescent field detection principle is employed.The scanning microwave images of internal hidden metal structure beneath a dielectric layer were obtained in the experiments,and clear images of 0.01λ super resolution were attained.This paper discussed the non-destructive internal detection technology of scanning evanescent microwave microscope,and provided an important research foundation for internal non-destructive examination and quality control of objects.
Keywords:non-destructive perspective detection  scanning evanescent microwave microscope  evanescent field  capacitance-loaded coaxial resonator  probe
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