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激光位置检测中PSD的误差分析与实验研究
引用本文:朱明珠,陈培峰,周保玉,曾为.激光位置检测中PSD的误差分析与实验研究[J].光电子技术与信息,2006,19(3):10-14.
作者姓名:朱明珠  陈培峰  周保玉  曾为
作者单位:华中科技大学激光技术与工程研究院,湖北,武汉,430074
摘    要:通过实验研究了激光光束质量对PSD输出位置精度的影响。基于PSD工作原理分析并得出了背景光强与输出结果的关系,实验中采用与测量光源匹配的滤光片来消除背景光干扰,极大提高了PSD的测量精度。并通过双一次插值算法修正PSD的非线性误差,修正后结果表明B区测量误差显著减小,线性度和测量精度明显提高。

关 键 词:激光检测  位置精度  位置敏感探测器  背景光  非线性  插值算法
文章编号:1006-1231(2006)03-0010-05
收稿时间:2005-09-07
修稿时间:2006-02-16

The Error Analysis and Experimental Study on PSD Used in Laser Position Detection
ZHU Ming-zhu,CHEN Pei-feng,ZHOU Bao-yu,ZENG Wei.The Error Analysis and Experimental Study on PSD Used in Laser Position Detection[J].Optoelectronic Technology & Information,2006,19(3):10-14.
Authors:ZHU Ming-zhu  CHEN Pei-feng  ZHOU Bao-yu  ZENG Wei
Abstract:In the experiment, the effects of laser beam quality on the output position precision of the PSD are analyzed. The relationship between background light intensity and output of the PSD is analyzed based on the working theory of the PSD, the opticat filter matching up to the wavelength of the source tight is used to remove the disturbance due to the background light and the measure precision is improved. In order to improve the linearity and measure precision of B area of the PSD, duo-linear interpolation Algorithm is provided to correct the nonlinearity error. The corrected results show th.at the measure error of B area decreases greatly, the linearity and measure precision improve greatly.
Keywords:laser detection  position precision  PSD  background light  nonlinearity  interpolation algorithm
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