| 一维深亚波长光栅的耦合波分析及偏振特性的研究 |
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| 引用本文： | 袁惠,周进,王晓伟,黄信凡.一维深亚波长光栅的耦合波分析及偏振特性的研究[J].中国激光,2002,29(9):795-800. |
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| 作者姓名： | 袁惠 周进 王晓伟 黄信凡 |
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| 作者单位： | 南京大学物理系,江苏南京,210093 |
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| 基金项目： | 国家自然科学基金(90101020)，江苏省自然科学基金(BK2001028) |
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| 摘 要： | 讨论了一种新的一维深亚波长光栅,其周期结构由等离子体增强化学气相淀积法(PECVD)制备的周期性多层膜构成。简单介绍了这种深亚波长光栅的制作方法。采用严格耦合波分析(RCWA)理论计算了这种一维深亚波长光栅的衍射效率,分析了它的偏振特性。
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| 关 键 词： | 一维深亚波长光栅 严格耦合波分析 偏振特性 |
| 收稿时间： | 2001/6/22 |
Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating |
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| YUAN Hui,ZHOU Jin,WANG Xiao-wei,HUANG Xing-fan.Rigorous Coupled-wave Analysis of a New One-dimensional Deep Sub-wavelength Grating[J].Chinese Journal of Lasers,2002,29(9):795-800. |
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| Authors: | YUAN Hui ZHOU Jin WANG Xiao-wei HUANG Xing-fan |
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| Abstract: | An one-dimensional deep sub-wavelength grating is studied. A new method is developed for this sub-wavelength gratings fabrication. In this method, the grating periods are composed of multilayer films which are obtained by the method of PECVD. The diffractive efficiency of the grating is computed by using rigorous coupled-wave analysis (RCWA). The property of polarization of the grating is also discussed. |
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| Keywords: | one-dimensional deep sub-wavelength grating rigorous coupled-wave analysis (RCWA) polarization |
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