| 半导体激光器的光学反馈干涉及传感应用 |
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| 引用本文： | 王鸣,聂守平,李达成.半导体激光器的光学反馈干涉及传感应用[J].中国激光,2002,29(12):1122-1126. |
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| 作者姓名： | 王鸣 聂守平 李达成 |
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| 作者单位： | 1. 南京师范大学物理科学与技术学院光电技术江苏省重点实验室,江苏,南京,210097
2. 清华大学精密测试技术与仪器国家重点实验室,北京,100084 |
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| 基金项目： | 国家自然科学基金 (No .5 0 0 6 5 0 0 2 )，江苏省自然科学基金 (No .BK2 0 0 110 9)资助项目 |
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| 摘 要： | 分析和讨论了激光反馈干涉现象 ,根据半导体激光器的反馈干涉理论 ,研究了反馈干涉模型及其信号的调制和解调方法 ,介绍了典型的传感应用。理论和实验表明 ,激光反馈干涉的理论不同于传统干涉 ,信号处理方法也有其特点。半导体激光器的光学反馈干涉系统具有结构简单、光路易准直、无需附加器件的特点 ,因而能够发展成小型、在线测量和过程控制的传感器 ,测量距离、位移和速度 ,在微机械、光学工程等领域具有应用前景。
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| 关 键 词： | 光学反馈干涉 半导体激光器 传感应用 |
| 收稿时间： | 2001/9/10 |
Optical Feedback Interferometry of Semiconductor Laser for Sensing Application |
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| WANG Ming ,NIE Shouping ,LI Dacheng.Optical Feedback Interferometry of Semiconductor Laser for Sensing Application[J].Chinese Journal of Lasers,2002,29(12):1122-1126. |
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| Authors: | WANG Ming NIE Shouping LI Dacheng |
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| Affiliation: | WANG Ming 1,NIE Shouping 1,LI Dacheng 2 1Department of Physics,Nanjing Normal University,Nanjing,Jiangsu 210097 2State Key Laboratory of Precision Measuring Technology & Instruments,Tsinghua University,Beijing 100084 |
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| Abstract: | In this paper, the laser feedback interference phenomenon is analyzed and discussed. The basic interference theory and signal processing technique are studied; some typical sensing applications are introduced. Laser feedback interference is different from other convertional interference. The optical feedback interference of semiconductor laser has many advantages in that optical system is much simple and is easily aligned; additional optical elements are not required. A compact sensor was constructed for the online measurement of the distance, displacement and velocity. It is a promising technique used in microelectromechanical systems (MEMS), optical engineering and other engineering application. |
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| Keywords: | optical feedback interferometry semiconductor laser sensing application |
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