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提高氧化物介质膜层损伤阈值的研究
引用本文:刘强,林理彬,蒋晓东,黄祖鑫,甘荣兵,唐方元.提高氧化物介质膜层损伤阈值的研究[J].中国激光,2003,30(7):637-641.
作者姓名:刘强  林理彬  蒋晓东  黄祖鑫  甘荣兵  唐方元
作者单位:1. 四川大学物理系,四川,成都,610064
2. 中国工程物理研究院激光聚变研究中心,四川,绵阳,621900
摘    要:采用新清洗工艺对K9玻璃基片进行了清洗,镀制了多种氧化物介质膜,镀膜后的膜层损伤阈值比一般清洗要高出一倍多。用等离子体光法和相衬显微镜观察法相结合来判断损伤,分别用1-on-1测试法和R-on-1测试法确定了膜层的激光损伤阈值。

关 键 词:薄膜物理学  损伤阈值  清洗  镀膜
收稿时间:2002/8/12

Study on Improving Damage Threshold of Dielectric Films
LIU Qiang,LIN Li-bin,JIANG Xiao-dong,HUANG Zu-xing,GAN Rong-bing,TANG Fang-yuan.Study on Improving Damage Threshold of Dielectric Films[J].Chinese Journal of Lasers,2003,30(7):637-641.
Authors:LIU Qiang  LIN Li-bin  JIANG Xiao-dong  HUANG Zu-xing  GAN Rong-bing  TANG Fang-yuan
Affiliation:LIU Qiang,LIN Li-bin,JIANG Xiao-dong,HUANG Zu-xing,GAN Rong-bing,TANG Fang-yuan Department of Physics,Sichuan University,Chengdu,Sichuan 610064,China, National Key Laboratory of Laser Fusion,CAEP,Mianyang,Sichuan 621900,China)
Abstract:K9 glass substrates were cleaned by using a new cleaning technology, and some single-layer and multilayer coatings were prepared with the various oxide materials and different film thickness by the electron-beam evaporation technique. Comparison between the new cleaning technology and the ordinary cleaning was made in the experiments, and it were found that the new cleaning technology improved the surface roughness and the damage threshold of the new cleaning procedure showed twice as large as that of the ordinary cleaning procedure. Two methods of plasma spark and micrograph were used to detect the laser damage. Laser damage thresholds were obtained by using 1-on-1 test and R-on-1 test.
Keywords:thin film physics  damage threshold  cleaning  coating  recontamination  
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