激光微熔覆法制备空芯薄膜电感的研究

采用激光微熔覆方法制备了空芯薄膜电感,着重研究了激光功率密度对电感线宽影响,以及薄膜电感的结构参数变化对电感电性能影响。结果表明,线宽随激光功率密度增大而增大;电感量随着圈数增多、中心线间距增大、线宽变大而增大。通过优化激光工艺和结构参数,制备了面积5 mm×5 mm和9 mm×9 mm,线宽100 μm和120 μm,线中心间距250 μm和500 μm,圈数8和16,厚度1 μm的空芯回字型电感,在测试频率100 kHz～1 MHz条件下,电感量为240 nH±3 nH～1.2 μH±3 nH,单位面积电感量可达14.81 nH/mm2。通过实验证明,采用激光微熔覆法制备的微电感,在同样形状和面积下,可提高电感量。

Study of Thin Film Inductor with Air Core Fabricated by Laser Micro-Cladding Method

The thin film inductors with air core have been fabricated by laser micro-cladding technology. It has been studied systematically that how the change of laser power density affects the line width as well as how the inductive structure affects inductive electronic performance. The experimental results show that increasing the turns, broadening the distance between two center lines and enlarging line width will improve inductance at a different level. With the optimum of the laser processing parameters and the structural parameters, rectangular-spiral inductors are processed with area of 5 mm×5 mm and 9 mm×9 mm, line width of 100 μm and 120 μm, distance between two center lines of 250 μm and 500 μm, circle numbers of 8 and 16, and thickness of 1 μm. For those inductors, the range of inductance is from 240 nH±3 nH to 1.2 μH±3 nH, the inductance per unit area was up to 14.81 nH/ mm2 in the frequency range of 100 kHz to 1 MHz . By this technology, the experimental results demonstrate that the thin film inductors fabricated by optimizing structural parameters have the best performances at the same area and structure.