| 复合光源实时微振动干涉测量仪 |
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| 引用本文： | 李代林,王向朝,王学锋,郭立萍,刘英明.复合光源实时微振动干涉测量仪[J].中国激光,2004,31(3):50-353. |
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| 作者姓名： | 李代林 王向朝 王学锋 郭立萍 刘英明 |
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| 作者单位： | 中国科学院上海光学精密机械研究所信息光学研究实验室,上海,201800 |
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| 基金项目： | 国家自然科学基金 (6 99780 2 4 )，上海市科技发展基金 (0 114 6 10 6 0 ,0 114nm0 13)资助项目 |
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| 摘 要： | 提出了一种新的实时微振动激光干涉测量仪。通过采用复合光源和反馈系统，有效地消除了激光二极管-正弦相位调制(LD-SPM)干涉仪中由电流调制所带来的测量误差和外界干扰所带来的影响，实现了物体微振动的纳米精度实时测量。
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| 关 键 词： | 实时测量 微振动干涉测量仪 复合光源 激光干涉测量仪 |
| 收稿时间： | 2002/11/4 |
Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement |
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| LI Dai-lin,WANG Xiang-zhao,WANG Xue-feng,GUO Li-ping,LIU Ying-ming.Composite-Light-Source Interferometer for Real-Time Micro-Vibration Measurement[J].Chinese Journal of Lasers,2004,31(3):50-353. |
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| Authors: | LI Dai-lin WANG Xiang-zhao WANG Xue-feng GUO Li-ping LIU Ying-ming |
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| Abstract: | A novel LD-SPM interferometer, which can be used to measure micro-vibrations with a high accuracy in real time, is proposed. In this paper, a composite light source is employed to decrease the measurement errors caused by the light-intensity changes. Experiments verify the usefulness of the interferometer. |
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| Keywords: | measurement instrument real-time measurement micro-vibration interferometer |
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