| 测量大数值孔径光学系统小光斑的方法 |
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| 引用本文： | 徐文东,干福熹.测量大数值孔径光学系统小光斑的方法[J].中国激光,2003,30(2):171-174. |
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| 作者姓名： | 徐文东 干福熹 |
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| 作者单位： | 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 介绍了一种小孔扫描测量大数值孔径光学系统小光斑的方法。利用近场光学显微镜的光纤探针采样技术和压电陶瓷扫描技术 ,可对光学系统小光斑的光强分布进行高空间分辨的测量。由于光纤探针采样点的大小为几十纳米或更小 ,压电陶瓷扫描间距为几纳米或更小 ,因此该方法特别适合大数值孔径光学系统小光斑的测量。实验证明 ,采用该方法 ,测量的空间分辨率可达 5 0～ 10 0nm左右。
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| 关 键 词： | 应用光学 小光斑 近场光学显微镜光纤探针 大数值孔径光学系统 |
| 收稿时间： | 2001/5/24 |
Method for Testing Small Light Spot Produced by an Optical System with High NA |
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| XU Wen dong,GAN Fu xi.Method for Testing Small Light Spot Produced by an Optical System with High NA[J].Chinese Journal of Lasers,2003,30(2):171-174. |
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| Authors: | XU Wen dong GAN Fu xi |
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| Abstract: | This paper introduced a method to testing small light spot produced by an optical system with high NA. By using technology of fiber probe detecting and PZT tube scanning of near field optical microscopy, the small light spot can be measured with high spatial resolution. The results show that a resolution of 50～100 nm can be obtained. |
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| Keywords: | applied optics small light spot fiber probe of near field optical microscopy optical system with high NA |
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