首页 | 本学科首页   官方微博 | 高级检索  
     

多层介质膜光栅和介质膜反射镜抗激光损伤阈值研究
引用本文:孔伟金,刘世杰,沈自才,沈健,邵建达,范正修.多层介质膜光栅和介质膜反射镜抗激光损伤阈值研究[J].中国激光,2006,33(4):52-556.
作者姓名:孔伟金  刘世杰  沈自才  沈健  邵建达  范正修
作者单位:1. 中国科学院上海光学精密机械研究所,上海,201800;中国科学院研究生院,北京,100039
2. 中国科学院上海光学精密机械研究所,上海,201800
摘    要:对多层介质膜光栅以及介质膜反射镜的激光损伤阈值进行了系统的研究。测试方法采用国际测试标准。测试结果表明,介质光栅的损伤阈值远低于未刻蚀的多层介质膜。对样品损伤形貌的扫描电镜照片分析发现,相比于未刻蚀的多层介质膜,介质膜光栅的初始损伤主要发生在光栅槽形的侧壁,且损伤主要是由驻波场的空间分布引起的本征吸收、制备过程中引入的杂质污染以及刻蚀过程中HfO2的化学计量机失衡引起的。

关 键 词:薄膜  介质膜光栅  激光损伤阈值  电场分布  扫描电镜
文章编号:0258-7025(2006)04-0552-05
收稿时间:2005-08-12
修稿时间:2005-12-06

Laser Induced Damage Thresholds of Multi-Layer Dielectric Gratings and Multi-Layer dielectric Mirrors
KONG Wei-jin,LIU Shi-jie,SHEN Zi-cai,SHEN Jian,SHAO Jian-da,FAN Zheng-xiu.Laser Induced Damage Thresholds of Multi-Layer Dielectric Gratings and Multi-Layer dielectric Mirrors[J].Chinese Journal of Lasers,2006,33(4):52-556.
Authors:KONG Wei-jin  LIU Shi-jie  SHEN Zi-cai  SHEN Jian  SHAO Jian-da  FAN Zheng-xiu
Affiliation:1. Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China ;2.Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
Abstract:Laser-induced damage thresholds of multi-layer dielectric mirrors and multi-layer dielectric gratings were investigated in this paper.Experimental results indicate that the damage threshold of multi-layer dielectric mirrors was larger than that of multi-layer dielectric gratings.Damage morphologies were observed by using scanning electron microscope.It was found that the initial damage occurred at the edge of the groove for multi-layer dielectric gratings.The following factors resulted in decreasing of laser-induced damage threshold for multi-layer dielectric gratings: the electric filed distribution induced intrinsic Absorption,the pollution induced Absorption during manufacture process and the unbalance in stoichiometry of HfO_2 film.
Keywords:thin films  dielectric gratings  laser-induced damage threshold  electric field distribution  scanning electron microscope
本文献已被 CNKI 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号