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氧化锌薄膜的电化学沉积法制备及受激发射研究
引用本文:张宇,王刚,崔一平,翁健,马懿,徐岭,徐骏,陈坤基,张海黔,顾宁.氧化锌薄膜的电化学沉积法制备及受激发射研究[J].中国激光,2004,31(1):7-100.
作者姓名:张宇  王刚  崔一平  翁健  马懿  徐岭  徐骏  陈坤基  张海黔  顾宁
作者单位:1. 东南大学分子与生物分子电子学教育部重点实验室,江苏,南京,210096;南京大学物理系固体微结构物理国家重点实验室,江苏,南京,210093
2. 东南大学电子工程系,江苏,南京,210096
3. 南京大学物理系固体微结构物理国家重点实验室,江苏,南京,210093
4. 东南大学分子与生物分子电子学教育部重点实验室,江苏,南京,210096
基金项目:国家自然科学基金 (No .5 0 2 0 2 0 0 9,10 0 74 0 2 3)资助项目
摘    要:采用一种简单的电化学沉积法,在三电极化学池中,以单一的硝酸锌水溶液作为电沉积液,制备了高光学质量的半导体ZnO薄膜。透射光谱测量表明其光学带隙为3.35eV,400~2000nm波段的光学透过率大于80%。X射线衍射(XRD)和原子力显微镜(AFM)研究表明,ZnO薄膜为纤锌矿结构的无序多晶颗粒膜,微晶尺寸小于250nm。当用355nm的皮秒脉冲激光作为抽运源垂直入射薄膜表面时,可以检测到400nm附近的近紫外受激发射光,其强度随入射强度呈超线性增长关系,阈值在196.8kW/cm^2处,并且激光发射是多模的和各个方向的,还与被激发的面积有关,表现为随机激光发射机制。

关 键 词:薄膜物理学  氧化锌薄膜  电化学沉积  受激发射  随机激光
收稿时间:2003/3/4

Electrochemical Deposition and Stimulated Emission of Zinc Oxide Thin Films
ZHANG Yu ,WANG Gang ,CUI Yi-ping ,WENG Jian ,MA Yi ,XU Ling ,XU Jun ,CHEN Kun-ji ,ZHANG Hai-qian ,GU Ning National Laboratory of Molecular and Biomolecular Electronics.Electrochemical Deposition and Stimulated Emission of Zinc Oxide Thin Films[J].Chinese Journal of Lasers,2004,31(1):7-100.
Authors:ZHANG Yu    WANG Gang  CUI Yi-ping  WENG Jian  MA Yi  XU Ling  XU Jun  CHEN Kun-ji  ZHANG Hai-qian  GU Ning National Laboratory of Molecular and Biomolecular Electronics
Affiliation:ZHANG Yu 1,3,WANG Gang 2,CUI Yi-ping 2,WENG Jian 3,MA Yi 3,XU Ling 3,XU Jun 3,CHEN Kun-ji 3,ZHANG Hai-qian 1,GU Ning 1 1National Laboratory of Molecular and Biomolecular Electronics,2Department of Electronic Engineering,Southeast University,Nanjing,Jiangsu 210096,China 3National Laboratory of Solid State Microstructures and Department of Physics,Nanjing University,Nanjing,Jiangsu 210093,China
Abstract:Wide bandgap semiconductor zinc oxide thin films have been prepared by an electrochemical deposition performed in a chemical cell with three-electrodes, using an aqueous solution of Zn(NO_3)_2 as electrodeposition solution. The obtained ZnO thin films have optical bandgap of 3.35 eV and optical transmittance larger than 80% in the range of 400~2000 nm determined from their optical transmission spectra. XRD pattern indicates hexagonal wurtzite structure without c axis orientation for the ZnO thin films. AFM studies show a dense, irregular polycrystalline film structure with grain size below 250 nm. Stimulated emission occurs at a close ultraviolte wavelength of 403.9 nm under 355 nm optical pumping. When the excitation intensity exceeds a threshold (about 196.8 kW/cm2), very narrow emission peak (FWHM=0.5 nm) emerges and its intensity increases superlinearly with increasing the pump power. The stimulated eimission light is multimode laser relative to incident area and can be observed in all directions, showing a random laser emission due to the formation of a closed-loop path for scattered light in the ZnO thin film.
Keywords:thin film physics  zinc oxide thin films  electrochemical deposition  stimulated emission  random laser
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