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飞秒、皮秒激光烧蚀金属表面的有限差分热分析
引用本文:倪晓昌,王清月.飞秒、皮秒激光烧蚀金属表面的有限差分热分析[J].中国激光,2004,31(3):77-280.
作者姓名:倪晓昌  王清月
作者单位:天津大学精密仪器与光电子工程学院超快激光研究室,光电信息技术科学教育部重点实验室,天津,300072
摘    要:为描述飞秒激光烧蚀金属表面过程,对双温方程进行了约化。用有限差分法对飞秒、皮秒脉冲激光在金属表面烧蚀过程的温度场进行了一维数值模拟。分析了在飞秒领域对双温方程约化的合理性。计算模型对电子与光子耦合系数的大小对金属表层电子温度的影响进行了分析。同时考虑不同脉宽、不同能流及功率密度大小的因素。发现电子与晶格耦合系数影响材料表面电子的温升及电子与晶格温度耦合时间;与皮秒激光比较。脉冲功率密度是影响电子最终温度的主要因素;飞秒激光烧蚀金属材料的厚度可达到表层厚度(吸收系数的倒数)量级。

关 键 词:皮秒激光  有限差分  热分析  飞秒激光加工  双温模型  激光烧蚀  金属表面处理
收稿时间:2002/11/7

Finite Difference Method for Thermal Analysis of Femtosecond-Picosecond Pulse Laser Ablation on Metal Surface
NI Xiao-chang,WANG Qing-yue.Finite Difference Method for Thermal Analysis of Femtosecond-Picosecond Pulse Laser Ablation on Metal Surface[J].Chinese Journal of Lasers,2004,31(3):77-280.
Authors:NI Xiao-chang  WANG Qing-yue
Abstract:To describe femtosecond laser ablation on metal surface, the double-temperature equation (DTE) was formatted simply. In this paper, numerical simulation for temperature field of femtosecond-picosecond pulse laser ablation on metal surface is performed by finite-difference method (FDM). It is reasonable to make the DTE simple in femtosecond scale. It is also analysed that the effect of electron-lattice couple coefficient g on surface temperature, and found that g determines the surface temperature rising rate and the electron-lattice couple time. Compared with picosecond pulse laser, the intense of pulse is the main factor of the finally temperature of electron. The ablated depth of femtosecond laser can be controlled as thick as the surface depth of metal.
Keywords:laser technique  finite-difference method  femtosecond laser ablation  double-temperature function
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