| 新型NO2薄膜气敏元件的研究 |
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| 引用本文： | 林伟,黄世震,陈文哲.新型NO2薄膜气敏元件的研究[J].半导体技术,2010,35(7):664-668. |
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| 作者姓名： | 林伟 黄世震 陈文哲 |
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| 作者单位： | 福州大学材料科学与工程学院,福州,350002;福州大学物理与信息工程学院,福州,350002;福州大学福建省微电子集成电路重点实验室,福州,350002;福州大学材料科学与工程学院,福州,350002 |
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| 基金项目： | 国家科技部863计划项目 |
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| 摘 要： | 采用射频反应磁控溅射方法制备了氧化钨/多壁碳纳米管(WO3/MWCNTs)薄膜材料,并在此基础上研制NO2气敏元件.采用X射线衍射仪(XRD)、X光电子能谱仪(XPS)、扫描电子显微镜(SEM)来研究WO3/MWCNTs材料的表面形貌、表面化学状态、表面化学元素等材料特性.研究结果表明,MWCNTs已经掺杂进WO3材料,合成的WO3/MWCNTs气敏元件表现出对NO2气体有较高的灵敏度和较好的响应-恢复特性,并解释了该元件的工作机理.
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| 关 键 词： | 氧化钨/多壁碳纳米管 射频反应磁控溅射 NO2气敏元件 |
Study on New NO2 Thin Film Gas Sensor |
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| Lin Wei,Huang Shizhen,Chen Wenzhe.Study on New NO2 Thin Film Gas Sensor[J].Semiconductor Technology,2010,35(7):664-668. |
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| Authors: | Lin Wei Huang Shizhen Chen Wenzhe |
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| Affiliation: | Lin Weia,b,c,Huang Shizhena,Chen Wenzhea(a.College of Material Science and Engineering,b.College of Physics & Information Engineering,c.FuJianKey Laboratory of Microelectronics and Integrated Circuits,FuZhou University,FuZhou 350002,China) |
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| Abstract: | WO3/MWCNT composite thin film was prepared by using radio frequency(RF)reactive magnetron sputtering both commercially available WO3 material and multi-walled carbon nanotubes(MWCNT).Microstructure and surface morphology of the composite were investigated by XRD,XPS and SEM.The results reveal that the MWCNTs are still present and well doped in WO3 grains in the composite thin film.The gas-sensing property of WO3/MWCNT composite thin film was examined.The optimal composite sensor exhibits much higher respons... |
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| Keywords: | WO3/MWCNTs RF reactive magnetron sputtering NO2 gas sensors |
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