| 薄膜体声波谐振器及其应用 |
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| 引用本文： | 池志鹏,赵正平,吕苗,杨瑞霞. 薄膜体声波谐振器及其应用[J]. 半导体技术, 2006, 31(5): 377-381 |
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| 作者姓名： | 池志鹏 赵正平 吕苗 杨瑞霞 |
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| 作者单位： | 河北工业大学信息工程学院,天津,300130;河北工业大学信息工程学院,天津,300130;河北半导体研究所微米纳米中心,石家庄,050051;河北半导体研究所微米纳米中心,石家庄,050051 |
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| 基金项目： | ASIC国防重点实验室基金 |
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| 摘 要： | 综合阐述薄膜体声波谐振器技术,简要介绍了薄膜体声波谐振器技术及其发展历程,对其物理模型和等效电路模型进行了回顾,对该器件的三种结构和及其制作方法进行了分析,并讨论了其使用的压电材料和电极材料,最后给出了该器件在微波领域的典型应用和相关指标.
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| 关 键 词： | 体声波 谐振器 滤波器 |
| 文章编号： | 1003-353X(2006)05-0377-05 |
| 收稿时间： | 2005-11-09 |
| 修稿时间： | 2005-11-09 |
Thin Film Bulk Acoustic Resonators and Applications |
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| CHI Zhi-peng,ZHAO Zheng-ping,Lv Miao,YANG Rui-xia. Thin Film Bulk Acoustic Resonators and Applications[J]. Semiconductor Technology, 2006, 31(5): 377-381 |
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| Authors: | CHI Zhi-peng ZHAO Zheng-ping Lv Miao YANG Rui-xia |
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| Affiliation: | 1.School of Information Engineering, Hebei University of Technology, Tianjin 300130, China; 2.Micro/Nano Technology Center, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
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| Abstract: | The thin film bulk acoustic resonators(FBAR) technology was surveyed.After a general and historical introduction to FBAR,a review of two types of models FBAR was given.Three device structures and their fabrications were analyzed,and the suitable piezoelectric materials and electrode materials for FBAR were discussed.Finally,an overview of the most important microwave applications is given,along with relevant performance data. |
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| Keywords: | bulk acoustic resonator filter |
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