| 柠檬酸溶胶-凝胶法制备非晶YBCO薄膜 |
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| 引用本文： | 杨明珠,杨培志,刘黎明.柠檬酸溶胶-凝胶法制备非晶YBCO薄膜[J].半导体技术,2008,33(4):324-327. |
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| 作者姓名： | 杨明珠 杨培志 刘黎明 |
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| 作者单位： | 昆明物理研究所,昆明,650223 |
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| 摘 要： | 采用柠檬酸溶胶-凝胶法(Pechini工艺)制备了钇钡铜氧(YBCO)溶胶,在SiO2/Si(110)衬底上生长了非晶YBCO薄膜.通过差热-热重分析得到了非晶YBCO薄膜的热处理务件.讨论了pH值对薄膜元素配比和表面形貌的影响,研究了薄膜结晶状态与退火温度之间的关系,获得了较为理想的薄膜制备工艺参数.
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| 关 键 词： | 钇钡铜氧 非晶薄膜 柠檬酸溶胶-凝胶法 |
| 文章编号： | 1003-353X(2008)03-0324-04 |
| 修稿时间： | 2008年1月22日 |
Preparation of YBCO Amorphous Semiconductor Thin Film by Pechini Method |
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| Yang Mingzhu,Yang Peizhi,Liu Liming.Preparation of YBCO Amorphous Semiconductor Thin Film by Pechini Method[J].Semiconductor Technology,2008,33(4):324-327. |
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| Authors: | Yang Mingzhu Yang Peizhi Liu Liming |
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| Affiliation: | Yang Mingzhu,Yang Peizhi,Liu Liming(Kunming Institute of Physics,Kunming 650223,China) |
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| Abstract: | YBCO amorphous thin films were prepared by Pechini method.The effects of pH value of precursor solution on performances of YBCO thin films were discussed.The relationship between the microstructure and morphology of YBCO thin films and the annealed processes were investigated by differential scanning calorimetry(DSC)and thermogravimetric analyzer(TGA),X-ray diffraction(XRD)and atomic force microscopy(AFM).Energy dispersive spectrometer(EDS)was used to determine elementary quantitative analysis.The optimal p... |
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| Keywords: | YBCO amorphous film Pechini method |
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