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Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers |
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| Authors: | E Fuentes-FernandezL Baldenegro-Perez M Quevedo-LopezBruce Gnade A HandeP Shah HN Alshareef |
| Affiliation: | a University of Texas at Dallas, 800 W. Campbell Rd., Richardson, TX 75080, USA b Texas MicroPower Inc., 18803 Fortson Ave., Dallas TX 75252, USA c Materials Science & Engineering, King Abdullah University of Science & Technology, Thuwal 23955-6900, Saudi Arabia |
| Abstract: | Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. |
| Keywords: | Piezoelectric material PZT Perovskite Cantilever Integration MEMS |
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