| 基于图像分析的SEM显微视觉自动聚焦技术研究 |
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| 引用本文： | 李勇滔,韩立.基于图像分析的SEM显微视觉自动聚焦技术研究[J].微细加工技术,2008(4). |
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| 作者姓名： | 李勇滔 韩立 |
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| 作者单位： | 1. 中国科学院电工研究所,北京,100080;中国科学院研究生院,北京,100039
2. 中国科学院电工研究所,北京,100080 |
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| 摘 要： | 为了快速准确地获取清晰的SEM显微图像,提出了一种基于图像分析的SEM显微视觉自动聚焦技术.该技术采用了两级清晰度评价函数的自动聚焦策略,首先利用基于灰度差分的评价函数对图像进行分析评价,然后以大步距遍历搜索函数峰值,直至第一次经过峰值;接着,再利用基于DCT(discrete cosine transformation)变换的评价函数来分析评价图像之后,以小步距进行局部搜索,直至搜索到清晰的SEM显微图像,完成SEM的自动聚焦.实验证明,该技术准确有效,具有较强的鲁棒性和实时性.
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| 关 键 词： | 自动聚焦 图像分析 |
Automatic Focusing Technology of SEM Image-vision Based on Image Analysis |
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| LI Yong-tao,HAN Li.Automatic Focusing Technology of SEM Image-vision Based on Image Analysis[J].Microfabrication Technology,2008(4). |
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| Authors: | LI Yong-tao HAN Li |
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| Affiliation: | LI Yong-tao1,2,HAN Li1(1.Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100080,China,2.Graduate School of Chinese Academy of Sciences,Beijing 100039,China) |
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| Abstract: | An automatic focusing technology of SEM image-vision based on image analysis is presented for acquiring distinct SEM images quickly and accurately.The present technology employed two kinds of image sharpness evaluation functions to process SEM images obtained,thus searching the function peak value in variable step to find the clearest image.That is,it used sharpness evaluation function based on image gray scale difference to analyze SEM image and searched the peak value in long step until passed the peak va... |
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| Keywords: | SEM |
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