| 电子束曝光机扫描场非正交性畸变校正 |
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| 引用本文： | 张明,张玉林.电子束曝光机扫描场非正交性畸变校正[J].微细加工技术,1995(2):6-10. |
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| 作者姓名： | 张明 张玉林 |
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| 作者单位： | 山东工业大学自动化工程系 |
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| 摘 要： | 本文介绍了我校研制的矢量扫描电子束曝光机中，扫描场非正交性畸变的校正情况，该机器的偏转系统为内透镜双磁偏转方式。
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| 关 键 词： | 电子束曝光机 偏转系统 畸变校正 |
CORRECTYION OF NON-ORTHOGONAL DISTORTION IN SCANNING FIELD OF ELECTRON BEAM LITHOGRAPHY MACHINE |
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| Zhang Ming,Zhang Yulin,Wang Guoxia,Zhao Chunmin.CORRECTYION OF NON-ORTHOGONAL DISTORTION IN SCANNING FIELD OF ELECTRON BEAM LITHOGRAPHY MACHINE[J].Microfabrication Technology,1995(2):6-10. |
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| Authors: | Zhang Ming Zhang Yulin Wang Guoxia Zhao Chunmin |
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| Abstract: | The paper introduces a method of correction of non -orthogonal distortionin scanning field of a vactor scan electron-beam lithography machine which isdeveloped in our university. The deflecting system of the machine uses in -lens double magnetic deflection technique. |
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| Keywords: | electron-beani lithography deflection system distortion correction |
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