| 用于微细圆弧加工的激光刻录机 |
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| 引用本文： | 贾连兴,张江陵.用于微细圆弧加工的激光刻录机[J].微细加工技术,1995(2):20-24. |
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| 作者姓名： | 贾连兴 张江陵 |
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| 作者单位： | 华中理工大学计算机系 |
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| 摘 要： | 声盘、视及光的亚微米圆弧线一般通过激光刻录机光刻制造，本文结合我国开发的用于磁盘伺服图形录写的激光刻录机，从机械结构、光路系统及计算机控制系统等方面，对其进行了研究分析。
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| 关 键 词： | 刻录机 微细加工 激光光刻 微细圆弧加工 |
LASER CUTTING MACHINE USED IN CIRCULAR MICROFABRICATION |
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| Jia Lianxing,Zhang,Jiangling,Ni Jiangming,Huang Yishen Huang yongfeng.LASER CUTTING MACHINE USED IN CIRCULAR MICROFABRICATION[J].Microfabrication Technology,1995(2):20-24. |
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| Authors: | Jia Lianxing Zhang Jiangling Ni Jiangming Huang Yishen Huang yongfeng |
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| Abstract: | The sub-micron circular features of Compact Disc,Video Disc and Optical Disc are usually produced by laser cutting machine .The paper analysed and studied the cutting machime which we developed to write servo patterns in mag-netic disc from aspects of machenical structure ,optical layout, and computercontrol system. |
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| Keywords: | cutting machine microfabrication laser lithography |
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