| 电磁场校正的子域变换和畸变速率补偿法 |
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| 引用本文： | 胡咏梅 姚作宾. 电磁场校正的子域变换和畸变速率补偿法[J]. 微细加工技术, 1996, 0(2): 1-6 |
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| 作者姓名： | 胡咏梅 姚作宾 |
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| 作者单位： | 山东工业大学自动化工程系 |
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| 摘 要： | 应用子域变换导出场的畸变函数，并给出畸变速率补偿法，以提高校正函数的逼近程度。
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| 关 键 词： | 电磁场校正；电子束曝光；区域交换 |
SUBFIELD MAPPING AND DISTORTION RATE COMPENSATION FOR CORRECTING METHOD OF ELECTROMAGNETIC FIELD |
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| Hu Yongmei,Yao Zuobin, Wang Shaojun. SUBFIELD MAPPING AND DISTORTION RATE COMPENSATION FOR CORRECTING METHOD OF ELECTROMAGNETIC FIELD[J]. Microfabrication Technology, 1996, 0(2): 1-6 |
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| Authors: | Hu Yongmei Yao Zuobin Wang Shaojun |
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| Abstract: | The distortion function of the fied is deduced with the subfield mappingmethod. And the distortion rate compensation method is given to increase thedegree of approach of the correction function. |
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| Keywords: | correction of electromagnetic field electronic beam lithography mapping of field |
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