| 一种平面区域的剖分 |
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| 引用本文： | 王绍钧.一种平面区域的剖分[J].微细加工技术,1994(2):9-15. |
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| 作者姓名： | 王绍钧 |
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| 作者单位： | 山东工业大学自动化工程系 |
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| 摘 要： | 本文提出一种图形剖分算法，可将任意条折线围成的平面区域，划分为一个互相不交的子域的集合。这种子域是ＬＳＩ掩模版加工设备可加工的。由此，ＬＳＩ掩模版图的设计，可避免受到加工设备的限制，使图样不论如何复杂，可以根据电路需要进行设计，从而保证电路性能。
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| 关 键 词： | 集成电路 版图图样 设计 平面区域 |
PARTITIONING OF A KIND OF PLANE FIELD |
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| Wang Shojun.PARTITIONING OF A KIND OF PLANE FIELD[J].Microfabrication Technology,1994(2):9-15. |
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| Authors: | Wang Shojun |
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| Abstract: | An algorithm of plane partitioning is presented.Any plane Which is bounded with several straight lines can be partitioned into a collection of independent subplanes,Such subplane can be fabricated by LSI mask-fabrication machine. Therefore, the design of LSI mask figure is not bound with mask fabrication machine,The mask figures could be more complex and various as to improve circuit property and increase the efficiency of design. |
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| Keywords: | algorithm analysis large scale integrated circuit(LSI) eiectronic beam exposure microfabrication technology |
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