| 电子束偏放输出温度漂移的自动补偿 |
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| 引用本文： | 尹明,孙晓军.电子束偏放输出温度漂移的自动补偿[J].微细加工技术,1999(1):39-43. |
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| 作者姓名： | 尹明 孙晓军 |
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| 作者单位： | 山东工业大学 |
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| 摘 要： | 分析了ＳＤＳ－２多功能电子束扫描系统输出温度漂移的主要因素，经过理论分析提出了一种减少温度漂移的有效方法，实验表明此方法有很好的温度漂移的自动补偿。
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| 关 键 词： | 扫描系统 温度漂移 偏放 补偿 |
AUTOMATIC COMPENSATION FOR TEMPERATURE DRIFT OF DEFLECTING OUTPUT OF E BEAM SYSTEM |
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| Yin Ming,Sun XiaoJun,Zhang Yulin.AUTOMATIC COMPENSATION FOR TEMPERATURE DRIFT OF DEFLECTING OUTPUT OF E BEAM SYSTEM[J].Microfabrication Technology,1999(1):39-43. |
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| Authors: | Yin Ming Sun XiaoJun Zhang Yulin |
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| Abstract: | The major factors which affect the temperature drift in a SDS 2 multifunction E beam scanning system are analysed. An effective method to reduce the temperature drift is given through the theoretical analysis. The experiments indicate that the temperature drift can be automatically compensated by this method. |
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| Keywords: | scanning system temperature drift aeflection amplifier compenastion |
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