| 微三维结构型腔的微细电火花加工 |
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| 引用本文： | 王振龙,赵万生,迟关心,刘光壮.微三维结构型腔的微细电火花加工[J].微细加工技术,2000(1):71-74,78. |
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| 作者姓名： | 王振龙 赵万生 迟关心 刘光壮 |
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| 作者单位： | 哈尔滨工业大学机械工程系,哈尔滨150000 |
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| 摘 要： | 利用简单截面形状电极，建立在在分层制造思想上的电极等损耗微细电火花加工技术是实现微三维结构微细加工的有效手段。分析了该方法的工艺特点；研究了实现该技术的条件及电极损耗补偿策略。
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| 关 键 词： | 微细电火花加工 微三维结构 微电子机械 |
| 文章编号： | 1003-8213(2000)01-0014-05 |
Micro-EDM for 3D Micro-Structure Cavity |
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| WANG Zhen-long,ZHAO wan-sheng,CHI Guan-xin,Liu Guang-zhuang.Micro-EDM for 3D Micro-Structure Cavity[J].Microfabrication Technology,2000(1):71-74,78. |
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| Authors: | WANG Zhen-long ZHAO wan-sheng CHI Guan-xin Liu Guang-zhuang |
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| Affiliation: | WANG ZHen-long
,ZHAO wan-sheng
,CHI Guan-xin
,LIu Guang-zhuang
;(Department of Mechanical Engineering, Harbin institute of Technology Harbin 150000, China) |
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| Abstract: | Uniform electrode wear micro-EDM based on laminar manufacture and using simple shape electrode is an effective method for 3D micro-structure. This paper analyses its machining characteristics and studies the conditions that bring this technology into use, then gives.the policy of electrode compensation in actual machining. |
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| Keywords: | Micro-EDM Laminar manufacture 3D Micro-structure Compensation |
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