首页 | 本学科首页   官方微博 | 高级检索  
     

ZnO材料的生长及表征
引用本文:李树玮,小池一步.ZnO材料的生长及表征[J].液晶与显示,2004,19(3):178-181.
作者姓名:李树玮  小池一步
作者单位:1. 中山大学,光电材料与技术国家重点实验室,广东,广州,510275
2. 大阪工业大学,新材料研究中心,日本,大阪,535-8585
基金项目:教育部回国人员留学基金资助项目(No.03 30100 4105443)
摘    要:氧化锌材料是新一代宽禁带光电子半导体材料和场致发射材料,通过等离子体分子束外延设备,在a-plane的蓝宝石衬底上生长了高质量的氧化锌外延材料。在生长过程中用反射高能电子束衍射仪(RHEED),研究了生长时材料薄膜的表面形貌。为了使材料更好地应用于器件,研究了材料的掺杂性质。研究了给体束缚激子(Donor bound exeiton (DX))、自由激子(Free exciton(EX))和受体束缚激子(Aeeeptor bound exciton (AX))随温度变化的发光过程。用紫外-可见透射光谱研究了ZnO薄膜材料的透射光谱性质。结果表明,用分子束外延生长设备成功地生长了高质量的氧化锌薄膜材料。

关 键 词:氧化锌  分子束外延  光致发光  透射光谱
文章编号:1007-2780(2004)03-0178-04
修稿时间:2004年1月4日

Growth and Characterization of ZnO Film Materials
LI Shu-wei,Koike Kazutogies,Zhongshan University,Guangzhou,China,.New Materials Research Center,Osaka Institute of Technology,Osaka-,Japan.Growth and Characterization of ZnO Film Materials[J].Chinese Journal of Liquid Crystals and Displays,2004,19(3):178-181.
Authors:LI Shu-wei  Koike Kazutogies  Zhongshan University  Guangzhou  China  New Materials Research Center  Osaka Institute of Technology  Osaka-  Japan
Affiliation:LI Shu-wei~1,Koike Kazuto~2gies,Zhongshan University,Guangzhou510275,China,2.New Materials Research Center,Osaka Institute of Technology,Osaka535-8585,Japan)
Abstract:Recently the growth techniques of single-crystalline ZnO film promote much attention to ZnO-related materials for electronic and optoelectronic applications. ZnO material has many fascinating properties such as a large bandgap energy corresponding to the emission in UV region.In this paper, ZnO films were grown by radical-source molecular beam epitaxy, and the epilays on a-plane sapphire substrates has a superior quality in crystallographic and optical properties. The surface during growth was monitored by a reflection high-energy electron diffraction (RHEED) system. After the growth, the film was characterized by transmittance spectrum and photoluminescence (PL) using 325 nm line of a He-Cd laser.
Keywords:ZnO film  radical-source molecular beam epitaxy  photoluminescence  transmittance spectrum
本文献已被 CNKI 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号