Trimmer工艺参数对切割效果的影响

激光焊切机(Trimmer)是显示面板(TFT-LCD)工业中不可或缺的设备,其作用是利用激光束切除显示面板上的Shorting Bar结构。Trimmer切割效果对于后工段良率有很大影响,因此研究Trimmer的工艺参数对切割效果的影响对于提升产品良率具有重要意义。本工作首先通过实验探究激光单脉冲能量E、激光频率f、切割速度v、加工光斑沿切割方向的边长a等工艺参数对于某款165cm(65in)产品的切割效果的影响,然后深入分析了Trimmer的切割机理,提出了囊括所有工艺参数的变量"ε",然后通过实验给出了对于膜厚为0.45μm的Cu材质Shorting Bar,Trimmer激光单脉冲能量必须在7mJ以上,ε在400mJ/mm~2以上,Trimmer可以将Shorting Bar切除干净,并且得出ε与表征切割效果的参量ω之间的函数关系,证实了ε值对于切割效果的影响。

Effect of trimmer process parameters on trimming result

Trimmer is an indispensable device in the TFT-LCD industry. Its function is to use a laser beam to cut off the Shorting Bar structure on the display panel. The trimming result has a great influence on the yield after the trimming section. Therefore, it is of great significance to study the influence of the Trimmer process parameters on the trimming result for improving the yield of product. In this work, the influence of various process parameters on the trimming result is studied through experiments. Then the trimming mechanism of Trimmer is deeply analyzed. The variable "ε" including all process parameters of Trimmer is proposed. Afterwards, experiments have shown that for the Shorting Bar with thickness of 0.45 μm Cu material, it can be removed cleanly only if the single pulse energy of the laser is 7mJ or more and the "ε" above 400 mJ/mm². The functional relationship between "ε" and the parameter "ω" that characterizes the trimming result is obtained, confirming the effect of "ε" value on the trimming result.