反射率测量技术研究的进展

阐述了反射率测量中的几种典型方法,并根据测量原理将它们分成了两大类。一类是根据检测光束在待测样品上的反射次数的(单)多次反射法;另一类是基于谐振腔特性的测量方法。以相对误差或测量精度作为设计的评价标准,论述和分析了各种技术的测量原理及其优缺点,介绍了国内外反射率测量技术的发展现状及其目前的技术水平。对测量技术的发展方向进行了剖析,提出一些影响测量精度的问题。

The advance of techniques of reflectivity measurement

The development of techniques of reflectivity measurements is reviewed and analyzed. Based on the measurement principles,the techniques can be divided into two types.One is single-reflectance,double-reflectance and multi-reflectance on the sample.The other is other measurement based on resonator's characteristics,such as optical cavity decay time,cavity ring-down spectroscopy,spherical cavity optical delay lines,the fineness of the resonator,and the loss compare between two active resonators.Their advantages and disadvantages,in particular,their measurement errors are discussed. Some current hot spots and future directions are analyzed.