步进电机脉冲当量及回程差的微位移测量系统

摘要:为了精确测量步进电机的脉冲当量和回程差，提出了一种基于薄膜干涉原理的激光微位移测量系统。该系统以He-Ne激光器为光源，配以牛顿环仪系统、面阵电荷耦合器（CCD）视频信号采集系统、计算机及数据处理软件等。采用条纹记数法实现微位移测量，具有四百分之一波长的位移分辨率。与传统测量方法相比，其精度、灵敏度及稳定性都有较大提高，特别适合范围在微米及微米以下的位移测量。在对TSA50-C型商用步进电机的测量中，结果验证了这种测量系统在普通实验室环境噪声中可以达到纳米级的位移测量精度。实验数据处理结果表明，对于5微米以下的脉冲当量及回程差的测量，该测量系统的相对误差分别为2.63%和0.44%。

Micro-displacement measurement system of pulse equivalent and return difference of a stepping motor

Abstract: In order to accurately measure the pulse equivalent and return difference of stepping motor, a laser micro-displacement measurement system is proposed based on thin film interference. The system includes He-Ne laser source, the Newton-ring device system, the planar CCD video signal gather system, the computer and data processing software. The measurement of micro-displacement is carried out by counting the fringe numbers with the resolution of 1/400 wavelength. The precision, sensitivity and stability in this system have been improved compared with traditional measurement technique, and the system is particularly suitable for the micron, sub-micron measuring range. The results of measurement with TSA50-C commercial stepping motor show that a displacement accuracy of nanometers scale is achieved in the common laboratorial environment. The results indicate the relative error for less than 5 m displacement of pulse equivalent and return difference. are 2.63% and 0.44% respectively.