基于相位解卷的位移测量系统

为了实现适度光反馈机制下对微位移进行测量的目的,采用了相位解卷的位移测量方法。该方法是在对系统参量C和α进行提前分离测量的基础上,通过寻找自混合干涉信号的特殊点,即峰值点、谷值点及转折点,恢复了含光反馈时的外腔相位,对外腔相位进行进一步的处理得到了外部运动物体的位移信息。仿真分析及实验结果验证了该测量方法的可行性。结果表明,对于十几微米的振动,该系统的测量误差仅为±30nm。这一结果对高精度微位移及微振动的测量是有帮助的。

Displacement Measurements Using Phase Unwrapping

Based on the effect of moderate OFSMI, a system is designed for displacement measurement in this paper.These techniques is based on the preliminary separate measurements of systerm parameters C and ,externsl cavity phase with optical feedback is renewed by choosing special points of self-mixing interference signal,namely peak points,veally points and transition points,further deal with the external cavity phase is used to obtain the displacement information of external movement object.Simulation and the result of experiment had proved feasibility of the measuremen . Measurement of displacement up to 10 has been achieved with an accuracy of 30nm.