A novel monolithic ultraviolet image sensor based on a standard CMOS process |
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Authors: | Li Guike Feng Peng Wu Nanjian |
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Affiliation: | National Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract: | We present a monolithic ultraviolet (UV) image sensor based on a standard CMOS process.A compact UV sensitive device structure is designed as a pixel for the image sensor.This UV image sensor consists ofa CMOS pixel array,high-voltage switches,a readout circuit and a digital control circuit.A 16 × 16 image sensor prototype chip is implemented in a 0.18 μm standard CMOS logic process.The pixel and image sensor were measured.Experimental results demonstrate that the image sensor has a high sensitivity of 0.072 V/(mJ/cm2) and can capture a UV image.It is suitable for large-scale monolithic bio-medical and space applications. |
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Keywords: | UV image sensor standard CMOS process floating gate |
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