Design and fabrication of 0.5 micron GaAs Schottky barrier diodes for low-noise terahertz receiver applications

Recent technological advances have made possible the development of heterodyne receivers with high sensitivity and high spectral resolution for frequencies in the range 1,000–3,000 GHz (1–3 THz). These receivers rely on GaAs Schottky barrier mixer diodes to translate the high-frequency signal to a lower frequency where amplification and signal processing are possible. At these frequencies, the diode quality is a major limitation to the performance of the receiver. The design, fabrication and DC evaluation of a diode for this frequency range is presented. A figure-of-merit cut-off frequency of over 10 THz is achieved with a record low zero biased capacitance of 0.5 fF. Results from RF tests are also given.