| 锯齿槽闪耀光栅制作误差对衍射效率的影响 |
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| 引用本文： | 葛建平,沈为民,刘全,陈明辉.锯齿槽闪耀光栅制作误差对衍射效率的影响[J].红外与激光工程,2013,42(6):1557-1561. |
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| 作者姓名： | 葛建平 沈为民 刘全 陈明辉 |
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| 作者单位： | 1.苏州大学 现代光学技术研究所,江苏苏州215006; |
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| 摘 要： | 与矩形槽和正弦槽光栅相比，锯齿槽光栅具有高的衍射效率，可采用全息离子束刻蚀和单点金刚石车削两种方法制造。首先，介绍了这两种方法的制造误差。然后，分析了这些制造误差对用于可见近红外和长波红外成像光谱仪的光栅衍射效率的影响，指出闪耀角误差、槽顶角误差和刻刀圆弧半径是影响锯齿槽光栅衍射效率的关键因素。为制作高质量成像光谱仪用光栅奠定了理论基础和指导。
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| 关 键 词： | 锯齿槽光栅 全息离子束刻蚀 单点金刚石车削 误差 衍射效率 |
| 收稿时间： | 2012-10-22 |
Effect of fabrication errors on the diffraction efficiency of sawtooth blazed grating |
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| Ge Jianping
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Shen Weimin
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Liu Quan
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Chen Minghui.Effect of fabrication errors on the diffraction efficiency of sawtooth blazed grating[J].Infrared and Laser Engineering,2013,42(6):1557-1561. |
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| Authors: | Ge Jianping Shen Weimin Liu Quan Chen Minghui |
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| Affiliation: | 1.Modern Optical Technology Institute of Soochow University,Suzhou 215006,China;2.Information Optics Engineering Institute of Soochow University,Suzhou 215006,China |
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| Abstract: | Compared with rectangular and sinus oidal grating, sawtooth grating has higher diffraction efficiency. It can be fabricated by holographic ion-beam etching and single point diamond turning (SPDT) technology. First, the errors in fabrication process with the two methods were introduced. Secondly, effect of these fabrication errors on the diffraction efficiency of sawtooth grating used in NIR and long-wave infrared imaging spectrometer was analyzed. It is indicated that blaze angle error, vertex angle error and burin radius are the main factors in diffraction efficiency. This provides a theoretical foundation and instruction for fabricating high-quality grating used in imaging spectrometer. |
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| Keywords: | sawtooth grating holographic ion-beam etching SPDT error diffraction efficiency |
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