飞秒激光微加工中光斑横向超分辨研究

飞秒激光微加工中焦点光斑横向光场的分布直接影响到激光微加工的精度、分辨率和表面粗糙度等。利用激光束空间整形技术对激光束聚焦光斑进行调制,基于横向超衍射理论和优化算法进行了研究和分析,完成了一种0-结构四环横向相位板的设计。该相位板归一化半径为r1=0.16、r2=0.27、r3=0.49,获得的峰值能量S、焦斑尺寸GT、旁瓣能量MT分别为0.38、0.74、0.20。并且基于该相位板在激光微加工系统中进行了一种光致变色材料的相位板加入前后的对比加工实验,实验结果表明,在飞秒激光微加工系统中使用这种相位板可以有效地减小加工点的尺寸大小。

Transverse spot superresolution in femtosecond laser microfabrication

In femtosecond laser micromachining lateral distribution of the focus light spot directly affects laser machining accuracy, resolution and surface roughness. Focused spot was modulated by using laser beam spatial shaping technology, lateral ultra diffraction theory was studied and analyzed, One kind of tetracyclic lateral modulation phase plate was designed by using optimization algorithms. The radiuses of the phase plane are r1=0.16、r2=0.27、r3=0.49, the peak energy S is 0.38, the focal spot size GT is 0.74, sidelobe energy MT is 0.20. The experiments were processed using a photochromic material before and after adding the phase plate in a laser micromachining system, the experiments results show that the performance of this super-diffraction phase element is particularly desirable in the femtosecond laser micromachining system, which can reduce the size of the point.