谐振式微光学陀螺仪谐振微腔的最新进展

基于Sagnac效应的谐振式微光学陀螺(Resonant Micro-Optical Gyros, RMOG)在集成化、小型化和灵敏度等方面具有巨大潜力，在微纳卫星姿态控制、机器人控制、医学诊断和检测仪器等领域中具有广阔的应用前景，成为近年来研究的热点。谐振微腔作为谐振式微光学陀螺的核心敏感元件，其光学特性与陀螺系统的性能息息相关，谐振腔的研究进展已经严重制约到谐振式微光学陀螺的发展，目前可以通过集成光学技术、微纳光学加工技术和新型材料的应用来减小谐振腔的重量和尺寸，降低成本和功耗，增加系统的可靠性和性能指标。结合期刊会议和相关研究机构披露的信息，简要介绍了谐振式微光学陀螺的发展现状、基本原理以及谐振微腔的特征参量，列举了近期国内外谐振微腔的各种新型结构设计并分析了不同结构的特点与潜力，此外还综述了近期国内外制作谐振微腔的新型材料并总结了不同材料的光学特性，初步探讨了谐振式微光学陀螺敏感单元谐振微腔的后续发展方向和技术发展途径。

Recent development of resonant micro cavity in resonant micro-optical gyro

Resonant micro-optical gyros (RMOG) based on Sagnac effect has great potential in integration, miniaturization and sensitivity, which has broad application prospects in the fields of micro nano satellite attitude control, robot control, medical diagnosis and detection instruments, and has become a research hotspot in recent years. Resonant micro cavity as the core sensing element of resonator micro optical gyroscope, the optical characteristics of which are closely related to the performance of gyroscope system. The research progress of resonator has seriously restricted the development of RMOG. At present, integrated optical technology, micro nano optical processing technology and the application of new materials can reduce the weight and size of the resonator, reduce the cost and power consumption, and increase the reliability and performance index of the system. Combined with the information disclosed by periodical conference and related research institutions, the development status, basic principle and characteristic parameters of resonant micro optical gyroscope were briefly introduced. Various new structure designs of resonant micro cavity at home and abroad were listed, and the characteristics and potential of different structures were analyzed. In addition, the new materials for fabrication of resonant micro cavity at home and abroad were reviewed, and the optical properties of different materials were summarized. The future development direction and technical development path of resonator micro cavity for resonator micro optical gyroscope were preliminarily discussed.