| 锆钛酸铅薄膜腐蚀研究 |
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| 引用本文： | 蔡长龙,李明,马卫红,刘卫国.锆钛酸铅薄膜腐蚀研究[J].红外与激光工程,2007,36(5):711-713. |
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| 作者姓名： | 蔡长龙 李明 马卫红 刘卫国 |
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| 作者单位： | 西安工业大学,光电微系统研究所,陕西,西安,710032 |
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| 基金项目： | 西安市科技局室温热成像系统资助项目 |
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| 摘 要： | 通过对腐蚀溶液的优化，获得了一种刻蚀效果良好的锆钛酸铅(PZT)薄膜的腐蚀溶液配方。文中所采用的PZT薄膜是通过溶胶?蛳凝胶(sol?蛳gel)法获得的，在研究腐蚀溶液组分、温度以及浓度对腐蚀速率影响的基础上，成功获得了PZT薄膜微图形化的湿法腐蚀工艺。通过实验研究，获得了横向和纵向腐蚀速率随温度和浓度变化曲线，侧蚀比（横比纵）小于1:1.07，且图形表面无残留物。
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| 关 键 词： | PZT薄膜 湿法腐蚀 腐蚀速率 |
| 文章编号： | 1007-2276（2007）05-0711-04 |
| 收稿时间： | 2006/11/10 |
| 修稿时间： | 2006-11-10 |
Eroding of lead zirconate titanate (PZT) thin films |
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| CAI Chang-long,LI Ming,MA Wei-hong,LIU Wei-guo.Eroding of lead zirconate titanate (PZT) thin films[J].Infrared and Laser Engineering,2007,36(5):711-713. |
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| Authors: | CAI Chang-long LI Ming MA Wei-hong LIU Wei-guo |
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| Affiliation: | Micro-optoelectrical System Laboratory, Xi′an Technology University, Xi′an 710032, China |
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| Abstract: | A wet- chemical eroding process of PZT thin films is reported. PZT films are prepared by the means of sol-gel methods. The influence of the solution compositions, temperatures and the concentrations on the eroding rate is studied. The patterning technique of PZT thin films is successfully obtained using the wet- chemical eroding. After researching, the relationship curves of the transverse and vertical eroding ratio are obtained, the ratio of transverse/vertical is less than 1:1.07, and no residues is on the pattern. |
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| Keywords: | PZT thin films Wet-chemical eroding Eroding rate |
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