| 二极管原理非制冷红外焦平面阵列的集成设计 |
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| 引用本文： | 王玮冰,陈大鹏,明安杰,欧文,刘战峰.二极管原理非制冷红外焦平面阵列的集成设计[J].红外与激光工程,2011,40(6):997-1000. |
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| 作者姓名： | 王玮冰 陈大鹏 明安杰 欧文 刘战峰 |
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| 作者单位： | 中国科学院微电子研究所 集成电路先导工艺研发中心 中国科学院微电子器件与集成技术重点实验室,北京,100029 |
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| 基金项目： | 国家863计划(2007AA04Z323) |
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| 摘 要： | 面向非制冷红外成像的低成本高性能应用,二极管原理的红外焦平面阵列的设计和工艺实现得到研究和发展.焦平面和读出电路的设计集成以及CMOS和MEMS工艺集成是此项技术的研究重点.基于SOI的二极管原理焦平面阵列在低成本的利用CMOS工艺实现大规模阵列集成方面有很大的优势.读出电路是基于标准CMOS工艺进行设计的.320×2...
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| 关 键 词： | 焦平面阵列 红外成像 非制冷 二极管 工艺集成 |
Integration of uncooled diode infrared focal plane array |
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| Wang Weibing,Chen Dapeng,Ming Anjie,Ou Wen,Liu Zhanfeng.Integration of uncooled diode infrared focal plane array[J].Infrared and Laser Engineering,2011,40(6):997-1000. |
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| Authors: | Wang Weibing Chen Dapeng Ming Anjie Ou Wen Liu Zhanfeng |
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| Affiliation: | Wang Weibing,Chen Dapeng,Ming Anjie,Ou Wen,Liu Zhanfeng (Integrated Circuit Advanced Process Center,Key Laboratory of Microelectronics Devices & Integrated Technology Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China) |
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| Abstract: | The design and fabrication of uncooled diode infrared focal plane array(FPA) have been developed for the applications of low cost and high performance uncooled infrared imaging technology.The design and integration of FPA and readout integrated circuit(ROIC),as well as the process integration of CMOS and MEMS are the important parts in the research and development of uncooled diode infrared FPA.Silicon on insulator(SOI) diode FPA takes great advantage of standard CMOS process for large scale array implement... |
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| Keywords: | focal plane array infrared imaging uncooled diode process integration |
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