| 扫描近场圆偏振光学显微镜 |
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| 引用本文： | 金涛,谢孟宇,冀胡东,吴丹丹,郑继红.扫描近场圆偏振光学显微镜[J].红外与激光工程,2017,46(11):1103003-1103003(5). |
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| 作者姓名： | 金涛 谢孟宇 冀胡东 吴丹丹 郑继红 |
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| 作者单位： | 1.上海理工大学 光电信息与计算机工程学院 上海市现代化光学重点实验室,上海 200093 |
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| 基金项目： | 国家自然科学基金（51075280）;上海市自然基金（16ZR1423000）;国家基金委中德合作研究中心项目（GZ1287） |
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| 摘 要： | 提出一种利用镀有金属薄膜的V形无孔光学探针构建的扫描近场光学显微镜，将圆偏振光注入镀有金属薄膜的V形槽内在针尖处形成近场照射光源，并利用探针收集样品表面近场光信号。理论分析表明:探针收集的近场和远场反射光之间存在一定的相位差，该相位差与探针机械结构、探针与样品的距离有关，可通过探针与样品之间的距离加以控制，因此利用偏振性器件可有效抑制远场光强。实验中，探针与样品之间的距离通过范德华力回馈控制，探针操作在接触模式，实验结果显示所测近场与远场光相位相差57，近场光学图像横向分辨率优于12 nm。
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| 关 键 词： | 近场光学 无孔光学探针 扫描近场圆偏振光学显微镜 |
| 收稿时间： | 2017-10-05 |
Scanning near-field circular polarization optical microscope |
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| Affiliation: | 1.Shanghai Key Lab of Modern Optical System,School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China |
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| Abstract: | A scanning near-field optical microscope (SNOM) based on an apertureless optical probe was presented. The probe had a V shape hollow on its top and coated with metal film. Illumination near-field light (NFL) will emit from the apex of probe when far-field light (FFL) is focused on the hollow. There is a phase difference between collected NFL and FFL, which relates to the distance between probe and sample. The collected FFL can be eliminated using a Glan-Taylor analyzer according to the phase difference. The experimental results show the phase difference of this system is 57. The spatial resolution of SNCOM is less than 12 nm. |
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