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超光滑基片表面散射的理论研究
引用本文:赵云,杨开勇.超光滑基片表面散射的理论研究[J].四川激光,2011(6):13-15.
作者姓名:赵云  杨开勇
作者单位:国防科学技术大学光电科学与工程学院,长沙410073
摘    要:从理论和数值模拟两个方面对超光滑表面的散射电磁场进行了分析研究。从极化电流源的散射出发,推导了基片表面背向散射电磁场的微分散射分布。通过与经典散射理论的比较,发现在入射角和散射角都较小时,结论与经典散射理论相一致,但是在入射角或者散射角较大时,两者存在差异,原因是理论中考虑了阴影遮蔽效应,导致了入射光或散射光必须透过两...

关 键 词:表面散射  微分散射  表面极化电流

Study on surface scattering of super-smooth substrate
ZHAO Yun,YANG Kai-yong.Study on surface scattering of super-smooth substrate[J].Laser Journal,2011(6):13-15.
Authors:ZHAO Yun  YANG Kai-yong
Affiliation:(College of Optoelectronic Science and Engineering,National University of Defense Technology,Changsha,410073)
Abstract:A theoretical and numerical method is described for calculating the angle-resolved scattering.Comparing with classical scattering theory,we find the conclusion drawn in this paper coincidences well with that of classical theory when incidence angle and scattering angle are both small,but they are different when incidence angle or scattering angle is large,which is caused by shielding effect of surface topography.Through theoretical analysis and numerical simulation,the theory in this paper is found to fit well with scatter measurement of super-smooth surface.
Keywords:surface scattering  angle-resolved scattering  surface polarization current
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