| 射频激励平板CO2激光器放电机理的理论研究 |
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| 引用本文： | 李贵安,宋建平,张相臣,唐令西,李貅.射频激励平板CO2激光器放电机理的理论研究[J].四川激光,2002,23(6):16-17. |
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| 作者姓名： | 李贵安 宋建平 张相臣 唐令西 李貅 |
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| 作者单位： | [1]西安交通大学电子与信息工程学院，西安710049 [2]西安永立激光电子公司，西安710069 |
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| 摘 要： | 本文以气体放电理论为基础，利用简化模型推导出射频激励平板CO2激光器气体放电击穿电压的数学关系式，指出影响激光气体放电击穿的几个物理参量。通过对激光气体放电进行数值模拟，得出放电等离子体电压－电流密度特性曲线，讨论了影响该曲线的物理因素，描述了放电等离子体的物理结构模型。把理论结论与相关实验测试结果比较，二者符合一致。
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| 关 键 词： | 射频激励 放电机理 CO2激光器 射频放电 放电击穿 电压特性 放电模型 二氧化碳 |
| 修稿时间： | 2002年7月5日 |
Theoretical studies on discharge mechanism of slab CO2 laser excited by RF |
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| Li Guian,Song Jianping,Zhang Xiangchen,Tang Lingxi,Li Xiu.Theoretical studies on discharge mechanism of slab CO2 laser excited by RF[J].Laser Journal,2002,23(6):16-17. |
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| Authors: | Li Guian Song Jianping Zhang Xiangchen Tang Lingxi Li Xiu |
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| Affiliation: | Li Guian 1 Song Jianping 1 Zhang Xiangchen 1 Tang Lingxi 2 Li Xiu 1 |
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| Abstract: | In this paper,the mathematical relationship of breakdown voltage of gas discharge in slab CO 2 laser excited by RF is derived by using reduced model based on the theory of gas discharge and several physical parameters which influence gas discharge breakdown of laser are pointed out.By means of numerical modeling of laser gas discharge,the characteristics of voltage-current density of discharge plasma are drawn and their physical influencing factors are discussed.The physical structure model of discharge plasma is described.Compared the relative experimental test results with theoretical conclusion,both are consistent. |
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| Keywords: | CO 2 laser rf discharge discharge breakdown voltage characteristic discharge model |
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