| Al2O3陶瓷表面的准分子激光活化沉积金属Cu技术 |
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| 引用本文： | 武颖娜,梁勇,冯钟潮.Al2O3陶瓷表面的准分子激光活化沉积金属Cu技术[J].四川激光,2000,21(5):43-44. |
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| 作者姓名： | 武颖娜 梁勇 冯钟潮 |
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| 作者单位： | 中国科学院金属研究所,沈阳 |
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| 摘 要： | 本文研究了通过ＸｅＣｌ准分子激光照射Ａｌ２Ｏ３陶瓷表面后，使其表面沉积金属Ｃｕ的技术，实验结果表明，Ａｌ２Ｏ３试样浸入Ｃｕ２ＳＯ４溶液后，金属Ｃｕ膜只沉积于激光照射区。经准分子激光照射，Ａｌ２Ｏ３表面结构的变化和Ａｌ富集区的产生是金属Ｃｕ沉积的主要原因。
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| 关 键 词： | 准分子激光 铜膜 陶瓷 氧化铝 表面 活化沉积 |
Excimer laser induced surface activation of alumina ceramics for electroless copper deposition |
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| Wu Yingna,Liang Yong,Feng Zhongchao.Excimer laser induced surface activation of alumina ceramics for electroless copper deposition[J].Laser Journal,2000,21(5):43-44. |
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| Authors: | Wu Yingna Liang Yong Feng Zhongchao |
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| Abstract: | In this presentation,selective Cu deposition on alumina(Al 2O 3)after XeCl excimer laser irradiation was described.After immersion in Cu 2SO 4 solution,the metal films of Cu Were only deposited on the laser irradiated area.Following excimer irradiation,modification of surface crystalline structure and formation of Al rich area are the main reasons for deposition of Cu on alumina. |
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| Keywords: | excimer laser Al_2O_3 the films of Cu Al rich area |
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